MTI Instruments
MTI Instruments is a worldwide supplier of precision non-contact physical measurement solutions, condition based monitoring systems, portable balancing equipment and semiconductor wafer inspection tools.
- 800 342 2203
518 218 2550 - 518 218 2506
- sales@mtiinstruments.com
- 325 Washington Ave. Extension
Albany, NY 12205-5505
United States
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product
Precision Signal Source/Function Generator
A portable, dual-channel voltage, frequency and charge signal generator with accuracies exceeding most high-cost laboratory function generators.
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2D-3D Laser Measurement
Long range profiling laser displacement sensor is built to satisfy the most demanding automated dimension, angle, curvature and height in the industrial application. At a fast speed of 6,000 frames per second and up to 2.5µm resolution, it also has measuring of up to 800 mm.
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Capacitance Sensors
Accumeasure Series
The Accumeasure product line features capacitive sensor products for high resolution gap and displacement measurements that require a high level of accuracy that is both stable and repeatable. A capacitive sensing system consists of a probe and amplifier. Capacitive measurements can be performed in a multitude of environments using non-contact passive capacitance probes that are not affected by magnet fields, temperature, humidity, nuclear radiation, and pressure. This is largely due to the nature of the rugged and passive capacitance probes.
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Capacitance Sensor Systems
MTI Instruments offers high resolution capacitance sensors, probes and systems that generate low noise, highly accurate and high stable measurements. Our Capacitance sensor line-up offers accurate measurements for automated inspection applications such as thread quality inspection, disk drive run-out, leveling or flatness measurement, lens alignment, tire run-out and bulging. Our Accumeasure capacitive sensors offer large stand-off distance that includes single and multiple channel rack systems that connect up to 10 capacitive sensors or capacitance probes with individual analog measurement outputs. We also offer cost-effective customized capacitive sensor amplifier board and probe system for easy integration. Our inspection systems linearity exceeds 0.01% full scale measurement (FSM) and resolution to sub nanometers.
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Photovoltaic/Solar Metrology System
Multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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Semiconductor Metrology Systems
MTI Instruments'' semiconductor wafer metrology tools consist of a complete line of wafer measurement systems for virtually any material including Silicon wafer (Si), Gallium Arsenide wafer (GaAs), Germanium wafer (Ge) and Indium Phosphide wafer (InP). From manual to semi-automated wafer inspection systems, the Proforma line of wafer metrology inspection tools is ideal for wafer thickness, wafer bow, wafer warp, resistivity, site and global flatness measurement. Our proprietary push/pull capacitance probes provide outstanding accuracy throughout their large measurement range, allowing measurement of highly warped wafers and stacked wafers. MTII''s solar metrology tools include off line manual systems for wafer thickness and Total Thickness Variation (TTV), as well as, in-process measurement systems capable of measuring wafer thickness, TTV and wafer bow at the speed of 5 wafers/second.
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Semi-automated Metrology System
Full wafer surface scanning for thickness, thickness variation, bow, warp, sori, site and global flatness
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Manual Semiconductor Metrology System
Front USB port enables easy storage of measurements and other data to flash drivesMTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and DependabilityNon-contact measurements76-300 mm diameter wafer rangeOptional wafer measurement ringsWafer stops for exact centeringEthernet interfaceFull remote control software (Windows compatible)Optional calibration wafers
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Fiber Optic Measurement Systems & Sensors
MTI Instruments offers large measurement range and standoff distance fiber-optic measurement sensors and probes that provide ultra sensitive linear output response. Our modular (interchangeable) non-contact fiber optic sensors systems have dual channel that enables the user to make simultaneous measurements. Our fiber optic probes are designed to automatically compensate large changes in reflectivity making it possible to monitor dynamic reflectance of up to 100:1 making it ideal for measuring vibration of ultrasonic horns, modal analysis of disk drive suspension, displacement and timing of fuel injectors and lateral motion measurements.