MicroSense, LLC
MicroSense, LLC, previously known as ADE Technologies, is comprised of two primary businesses – precision capacitive position sensors, and vibrating sample magnetometers for state-of-the-art magnetic measurement. Until the company was sold in November, 2009, we were a subsidiary of KLA-Tencor Corporation, a leading global supplier of semiconductor wafer defect inspection and metrology tools.
- 978-843-7673
- 205 Industrial Avenue East
Lowell, Massachusetts 01852
United States
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product
Longitudinal Magneto-Optic Kerr Effect System
KerrMapper S300 and V300
The KerrMapper family of tools utilizes the longitudinal Magneto-Optical Kerr Effect (MOKE) to characterize the magnetic properties of magnetic multi-layer wafers for data storage, MRAM, and other magnetic sensors. Utilizing a non-contact full-wafer measurement technique, the KerrMapper S300 and V300 systems create a map of the magnetic properties of entire wafers.
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Precision Capacitive Position Senso
4810
The MicroSense model 4810 is a non-contact precision position sensor. The 4810 is optimized for short range displacement measurement applications that require best possible linearity and stability.
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Precision Capacitive Position Sensor
8810
The MicroSense model 8810 is a non-contact precision position sensor. The 8810 is designed for best linearity and stability, with measurement bandwidth up to 20 kHz – ideal for servo system position feedback and fast tool servo applications
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Probes
2800 Series
Many sensor heads, or probes, are available for use with our 4800 series and 8800 series capacitive position sensor. The resolution of our capacitive position sensors is determined by a combination of the active sensing area of the probe, the measurement range, and the measurement bandwidth of the electronics unit (demodulator). Please refer to the Model 4810 data sheet for complete details on probe selection, including mechanical dimensions of our standard probes.
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Vibrating Sample Magnetometer
High Sensitivity Versatile Vibrating Sample Magnetometer (VSM)
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Capacitive Displacement Sensor
5810
The MicroSense Model 5810 is a single channel, non-contact precision capacitive displacement sensor. Designed for high dynamic applications, the Model 5810 provides high resolution with measurement bandwidth up to 100 kHz
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Capacitive Position Sensor for Nanopositioning
MicroSense Mini
The MicroSense Mini is a compact, high resolution linear displacement sensor designed specifically for providing servo system feedback, especially for OEM applications.The MicroSense Mini is a precision linear position sensor which delivers nanometer level resolution over measurement ranges up to a millimeter.
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Perpendicular MRAM
Polar Kerr System
The Polar Kerr System for MRAM utilizes the polar Magneto-Optical Kerr Effect (MOKE) to characterize the magnetic properties of multi-layer wafers used in the development and manufacturing of perpendicular MRAM. Utilizing a non-contact full-wafer measurement technique, the system creates a map of the magnetic properties of entire wafers up to 300 mm. The system is available in a manual loading or fully-automated configuration for use in R&D and/or production.
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Precision Capacitive Position Sensor
6810
Break the nanometer resolution barrier -- achieve picometer resolution with our highest resolution position sensorPrecision Position Sensor for Non Contact Displacement Measurement - Model 6810MicroSense introduces our new Model 6810 high resolution capacitive position sensor. The 6810, in combination with 6000 series probes, is a non-contact displacement measurement system intended to provide exceptionally high resolution, low noise measurements.
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Vector Magnetometer
10 VSM
The Model 10 Mark II VSM is the state of the art in VSM magnetometers. Its sensitivity and accuracy surpasses all other commercial vector magnetometers. Its field range and resolution make it the ideal system both for high and low coercivity materials. The accuracy in the determination of the magnetization vector, together with the high sensitivity, makes this the first VSM that can be a real alternative to a torque magnetometer for anisotropy studies on modern recording materials.
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Stamper Thickness Measurement Gauge
6360-HR-CD
The Model 6360-HR-CD Stamper Thickness Measurement System is a semi-automated thickness gauging platform and data analysis system for the measurement of optical media stampers. Patented non-contact capacitive sensors determine the stamper thickness without any damage to the stamper. A personal computer is provided to run the gauging platform, acquire measurement data and display results.
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Spindle Measurement Metrology System
SpinCheck
Measure and analyze spindle and motor performance with our SpinCheck spindle metrology system and non-contact capacitive displacement sensorsThe SpinCheck system includes a desktop PC, data acquisition and timing boards, comprehensive SpinCheck measurement and analysis software, and associated cables and accessories. SpinCheck measures and stores all data for analysis, display, printout or storage for future use.
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Magnetic Measurement
DiskMapper H7 System
The DiskMapper H7 system quickly determines the uniformity of the perpendicular recording layer of Heat Assisted Magnetic Recording (HAMR), also called Thermally Assisted Recording (TAR) disks, immediately after deposition, an important factor in the yield of disk drives. Utilizing a custom 7 Tesla bi-polar high speed superconducting magnet, the hysteresis loop of any disk location can be measured in less than 3 minutes.
