VLSI Standards, Inc.
VLSI Standards, Inc. was founded in 1984 in Mountain View, California for the purpose of developing measurement standards and associated services for the semiconductor and related industries.
- (800) 228-8574
(408) 428-1800 - (408) 428-9555
- sales.support@vlsistd.com
- Five Technology Drive
Milpitas, CA 95035-7916
United States
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product
ITO Sheet Resistance Standards (ITOSRS)
Indium Tin Oxide Sheet Resistance Standards (ITOSRS) from VLSI Standards are NIST-traceable products, intended for calibration of both contact and non-contact sheet resistance measurement tools used in the LCD, flat panel and touch-screen markets.
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NanoCD Standards (NCD)
The NanoCD™ (NCD) is the first commercially available standard to provide line width accuracy calibration at the 45 nm, 65 nm, 90 nm and 130 nm nodes. Use these standards for tool matching, calibrating the width of a CD-AFM tip, or CD-SEM diagnostics.
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NanoLattice Pitch Standard for Mask Handling Tools (NLSM)
The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.
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NanoLattice Pitch Standard (NLSM)
The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.
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Resistivity Standard
Resistivity Standards are bare silicon wafers available in 3 in, 8 in and 12 in sizes. The silicon is p-type (Boron) doped to nominal resistivity values, from 0.002 ohm.cm to 75 ohm.cm as available on the 3" model.
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Absolute Contamination Standards (ACS)
The Absolute Contamination Standard (ACS) is used to calibrate instruments which size and detect particles on the surface of bare silicon wafers. Use ACS to characterize particles, before particles characterize products.
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Solar Reference Cell
The Solar Reference Cells consist of a 20 mm x 20 mm monocrystalline silicon Photovoltaic Cell encased in a 92 mm x 70 mm x 16 mm metal enclosure with a protective quartz window and a temperature sensor. Designed for calibrating the irradiance of solar simulators used for testing solar cells and modules.
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Nanolattice Standards for Analytical Instruments
The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of Electron and Atomic Force Microscopes (AFM). Make the grade, with the highest quality pitch standard of its kind available.
