Electrogrip Company
Since 1985 Electrogrip has provided nanofabrication system support with: electrostatic chucks, high voltage power supplies, control systems, and custom vacuum chambers and hardware.
- 412 247 0992
- 412 362 0991
- mail@electrogrip.com
- 6945 Lynn Way
Pittsburgh, PA 15208
United States
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Electrostatic Chuck
CP Series
'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base. Standard CP chucks operate between -60 and +120 deg. C.
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EUV (Extreme UltraViolet) Chucks
Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.
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High Voltage Power Supplies
Isolating Power Couplers
Power & Telemetry Isolation: Use these power couplers with the DR5 and DR6 systems ...
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Vacuum Systems
Custom vacuum systems, and retrofits into existing systems, are also available.Electrogrip has extensive in-house and customer system design experience ...Mechanical, flow, and thermal simulation;Mechanical design and fabrication;Software system automation.DepEtchPro control software permits rapid automation, without programming:Process systems and robotic motion control are automated with job files and icon setup.Always under user control, hence permitting unlimited field upgrades.
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Glass-Gripping Chucks
Electrogrip is able to grip through one substrate to grip a second masking substrate.
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RF Filter
BD3
The BD3 'bias decoupler' filter removes radio-frequency high-voltage chuck signals from chuck powering lines, protecting the high voltage power supply. *
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Electrostatic Chucks
Chucks grip for micropatterning, temperature control, or robotics ...*insulating substrates,*hard disk drive head substrates,*semiconductor wafers,*InP-coated sapphire,*metal foils,*... and many other materials.
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High Voltage Power Supplies
DR5 Series
The DR5 system comprises: DR5A host controller; and DR5V high-voltage chuck power supply with adaptive grip and release.
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High Voltage Power Supplies
DR6 Series
The DR6 system employs a DR6A 'base station' which connects between the machine host computer and a DR6V high voltage module.
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High Voltage Power Supplies
DR4 Series
The DR4 driver is a high-voltage power supply with *adaptive grip and release; *two bipolar outputs capable of up to +/-6kV continuous output, and* outputs may be floated up to 4kV from ground at plasma bias potential.
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Gas Flow Controller
GFC Series
The GFC series enables quick interchange with standard MFCs: same mechanical outline, 4-VCR connectors on standard model, and 15-pin analog connector.
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High Temperature Chucks
High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.
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Analytical Software for Microscopy
SPIP
SPIP™ or Scanning Probe Image Processor - is an advanced software package for processing and analyzing microscopic images at nano- and microscale. It has been developed as a proprietary software by Image Metrology and is unique in the microscopy and microscale research market. With the high level of usable features, SPIP provides industrial and academic researchers with an advanced toolkit for working with microscope images, incl. extracting data from most microscopy file types, cleaning and enhancing data, analyzing measurements, visualizing and reporting analysis results. The software is used for research and innovation in a variety of industries such as pharmaceutical, cosmetics, semiconductors, hard disk manufacturing, polymer and aluminum manufacturing. Furthermore, SPIP is widely recognized as the standard microscope image analysis software for research and education at leading universities, and has been cited in more than 1200 scientific publications.
