Fraunhofer-Gesellschaft
The Fraunhofer IOF conducts application-oriented research in the field of optical systems engineering on behalf of its clients in industry and within publicly-funded collaborative projects.
- +49 3641 807-0
- +49 3641 807-600
- Albert-Einstein-Strasse 7
Beutenberg Campus
Jena, 07745
Germany
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Mechanical Simulation in Matlab
There are variety of numerical possibilities in the MATLAB and Simulink simulation environment. For those simulation environments we offer you various toolboxes that allow you to perform simulations easily and efficiently. These toolboxes can be combined with all available ways of MATLAB and Simulink. Our toolboxes can provide you support in the following areas: Analysis of structural dynamic behavior, Vibration and noise abatement, Design of active systems, Model Reduction, Ansys-Matlab interface.
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Optical Design and Simulation Services
The key area of expertise and the basis for all developments at the Fraunhofer IOF is optical and mechanical design as well as the simulation and analysis of optical and opto-mechanical systems inclusive of thermal and thermo-optical effects. Extensive design and modeling tools enable the simulation and optimization of systems for the THz to X-ray range - from micro-optics to astronomical telescopes.
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Optical Measurement Methods and Characterization Services
The Fraunhofer IOF develops optical measurement methods and systems to customer requirements. Key areas include the characterization of optical and non-optical surfaces, coatings, components and systems in the micro and sub-nano range as well as 3D shape acquisition.
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Electrostatic chucks
Semiconductor substrates such as Si wafers or masks for the next generation of extreme ultraviolet lithography (EUVL) are handled in a vacuum. For nm structures and exact overlay, the reproducibility of the substrate evenness is a crucial factor, as unevenness results in structural distortions. Particles are problematic and heat input as well as thermal expansion must be taken into account.