CI-Semi
CI Semi develops, manufactures and markets process monitoring and control systems for the semiconductor market. Active in the semiconductor process equipment market for the last decade, CI's family of NTM in situ noncontact temperature sensors incorporate real-time, same point emissivity measurement and compensation making them the ideal solution for a large variety of depositions and other processes in PVD, CVD, etch, and RTP semiconductor equipment.
- (650) 424-0682
- (650) 424-0683
- yael.baharav@ci-semi.com
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Israel
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In-situ Wafer Temperature Monitoring
CI Semi's family of noncontact temperature monitors (the NTM line), offers high end pyrometry products for the measurement of wafer temperatures during process. CI Semi’s flag ship of the line, the NTM Delta, incorporates real-time, same point emissivity measurement and compensation making it the ideal solution for in situ monitoring for processes such as RTP, CVD and PVD. The NTM family is sold to leading tool manufacturers.
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In-line Wet Process Concentration Monitoring
CI’s family of wet process concentration analyzers (WetSpec line) offers cost effective solutions for in-line wet chemistry monitoring. These products range from conductivity and NDIR solutions for simple chemistries concentration measurement, to spectroscopic systems for measuring multiple constituents and residues in complex solutions. The main concentration monitoring application that are served by CI Semi’s products are cleaning (SC1, SC2…) etching (HF, BOE, MAI….) and photo resist strippers (EKC, ACT, Piranha….).
