Unity Semiconductor SAS
UnitySC delivers visionary technologies that foster progress for people. We are recognized as a key player in inspection and metrology combining advanced technologies to enable higher yields and faster time to market.
- +33 (0)456 526 800
- +33 (0)456 526 801
- 611 rue Aristide Bergès,
Z.A. de Pré Millet, 38330
Montbonnot-Saint-Martin,
France
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product
High Speed Five Zone Edge Inspection & Metrology
THOR
• Water edge defectivity and EBR measurements• Available at all edge zones in one scan• Ideal companion to upgrade Wotan• High speed• High sensitivity
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Automated High-Resolution AOI Tool Modular Inspections
LIGHTiX
Next generation macro inspection system (AOI).• All-side wafer inspection: Front, back and edge inspection.• 100% defect images without throughput impact.• Integrated high-end microscope review.• True Color Inspection (TCI) technology.• Advanced CD, 2D/3D, OVL and EBR metrology.• Automatic defect classification• Best in class cost of ownership for high resolution AOI• High-speed patterned wafer inspection• High defect sensitivity• ISO Class 1 certified• Tool – to – tool matching
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product
Edge and Backside Inspection
LIGHTnPS
• Best in class throughput• High surface sentivity• Full haze characterization• High lifetime / low CoO solid state laser• Advanced Automatic Defect Classification
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High Sensitivity Dark Field Surface Inspection
LIGHTsPEED
High throughput• Nanometer scale sensitivity• Autofocus• Full haze characterization• Multisize capability• Pits / Particle distinction• High lifetime / low CoO solid state laser• Advanced Automatic Defect Classification
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Front and Back Side Topography Defect Detection
LIGHTsEE
High throughputNanometer range vertical sensitivitySimultaneous double side inspectionNanotopography and Topography measurementDetection of Slip lines, particles, Hairline cracks, SOI voids, Comets, EPI defects…Compliant with thin or thick wafers, taiko wafers, highly warped wafers
