El-Mul Technologies
leading supplier of advanced, high performance particle detectors that meet the most challenging needs of its customers.
- 972 (0) 8-942-2677
- 72 (0) 8-942-2676
- central@el-mul.com
- 12 Hamada St.
Rehovot, 76703
Israel
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product
Segmented STEM Detector
Opal
In a drive to meet our customers’ needs, El-Mul developed a detection solution for Scanning Transmission Electron Microscopes (STEM) which can support multiple applications such as DPC, cryo tomography, imaging of strain, charge, light elements or Z-contrast.
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product
SpectroMax
El-Mul’s proprietary technologies enable unique solutions for compact BSE energy spectrometers. El-Mul’s unique high-resistivity coating stands at the forefront of our energy filtering detection platform. This unique coating is key for high voltage holding over short distances in vacuum.
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product
SEM- Based Dectors
ScintiFast™
ScintiFast™ is El-Mul’s flagship scintillator technology enabling the next generation of detectors with shorter response time and higher sensitivity. Recently released, ScintFast™ has the highest available photon yield for the nanosecond scintillator category. ScintiFast™ is the scintillator of choice for detectors in SEM-based tools for the semiconductor market as well as in Time of Flight Mass Spectrometry instruments.
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product
BSE Detection
SLIM
SLIM™ is an innovative design for under-the-column BSE detection.SLIM™ puts El-Mul’s ScintiFast™ together with a segmented, shaped light guide and Silicon Photomultipliers (SiPM) to create a fast, sensitive, segmented and compact BSE detector for e-beam tools.
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Hi Rate Multi-Pixel Detection
Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions for such metrology systems and has designed and manufactured prototype detectors that can simultaneously detect 144 beams at 35MHz.
