Brooks Automation, Inc.
Brooks atmospheric robots and modules are an integral part of high-performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. Razor atmospheric robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations.
- +1-978-262-2400
- +1-978-262-2500
- 15 Elizabeth Drive
Chelmsford,, MA 01824
United States
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The Brooks field-proven wafer transport robots and modules deliver high performance and low total cost of ownership to create manufacturing efficiency, accelerate innovation, and drive profits for today’s manufacturers.
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Reticle Handling
A reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
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Sorters
Spartan™
The unified wafer management system gives the Spartan™ Sorter the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. The Spartan Sorter offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
