Semi-Automatic Probe Sheet Resistance/Resistivity Measurement

• Multi-points measurement and Mapping display
- 2-D map / 3-D map graphic display
- Multipoint pattern measurement is programmed (maximum 1225 points) and random pattern is programmable by operator.
• Film thickness conversion function from sheet resistance
• Measurement data base link with Excel via CSV format file
• Software language can be switched in English /Japanese by operator

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Topics

Measurement
Probes
Data Pattern
3D
Data Link
Sheet Resistance
Display
2D
Conversion
Data