X-ray Photoelectron Spectroscopy Analysis (XPS Analysis)
Rocky Mountain Laboratories, Inc.
X-ray photoelectron spectroscopy (XPS Analysis) also called Electron Spectroscopy for Chemical Analysis (ESCA) is a chemical surface analysis method. XPS measures the chemical composition of the outermost 100 Å of a sample. Measurements can be made at greater depths by ion sputter etching to remove surface layers.