NanoLattice Pitch Standard for Mask Handling Tools (NLSM)

VLSI Standards, Inc. (VLSI Standards)

The NanoLattice™ (NLSM) 100 nm pitch standard utilizes gratings with near perfect periodicity to calibrate magnification and scan linearity of CD-SEM and Atomic Force Microscopes (AFM). Make the grade, with the only pitch standard of its kind available below the 130 nm node.