Probe Station

ETCP1000 - ECOPIA

Installation of “Hot and cool chuck”
- Sellectable chuck size : 4inch, 6inch.
- Temperature variation : -193°C ~ 300°C (80K ~ 573K)
- Additional requirements : Vacuum chamber, LN2 tank(Bombei), microscope, CCD camera, manipulators.
- EPS500 is standard model in ETCP1000 probe station.