Rapid Thermal Processing system
RTP - 1300 - ECOPIA
Ecopia’s RTP (Rapid Thermal Processor) is able to do heat treatment on maximum 4inch wafer in very high speed. And, we have installed 12 pcs of hallogen lamps and it can make it possible to do heat treatment on the sample uniformly.
Furthermore, it is very convenient to use and we are providing at reasonable price. Therefore, it is good to use in university and laboratory.
