Mass Flow Controllers for Gases
Sensirion''s mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range. Based on the innovative CMOSens Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
