Vapor Concentration Controller

VCC-100 - HORIBA, Ltd.

One of the gas delivery methods from liquid and solid is bubbling. Bubbling is widely used in the Chemical Vapor Deposition (CVD) process. By applying the NDIR technology and the valve technology HORIBA has been developed for long time, the VCC-100 can maintain a constant concentration at a downstream of a bubbler in order to meet industry requirements from the advanced process control era.