Vision Metrology System

NGS 3500Z - RMS Vision Systems Inc

This bench top lower cost, yet high performance system is designed for applications where defect detection and precision
measurements on wafers and other parts (up to 200 mm) are required. It is well suited for use as a dedicated production
tool or as a versatile process development system. It features a powerful set of automated as well as semi-automatic
optical/ video tools optimized for high accuracy, production throughput, and ease of use.
This automated and versatile platform features a standard Nikon/ Olympus bright/ dark field microscope with optional
Nomarski, and precise part staging. This system offers significant and unique advantages for dual production/ engineering
use, and provides the perfect solution when both defect detection and dimensional metrology are required.