SlipFinder

YIS and SF Series - RMS Vision Systems Inc

The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystal
dislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilize
Makyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.
The SF300M and SF300N systems offer a low cost functionally equivalent alternative to the YIS series.