Optical microscopy (OM)
Materials Analysis Technology Inc. (MA-tek)
Optical microscopy is used to display the surface morphology of samples by 2D intensity contrast due to deflection and reflection of visible light shined on areas of interest. Its resolution is about half of the incident wavelength, which is ~0.2 μm for visible light (wavelength of 400-700 nm). Such resolution limits the maximum magnification to X1000, and thus optical microscopy provides preliminary inspection of sample surface structure.
