High Speed Five Zone Edge Inspection & Metrology
THOR - Unity Semiconductor SAS (UnitySC)
• Water edge defectivity and EBR measurements
• Available at all edge zones in one scan
• Ideal companion to upgrade Wotan
• High speed
• High sensitivity
THOR - Unity Semiconductor SAS (UnitySC)
• Water edge defectivity and EBR measurements
• Available at all edge zones in one scan
• Ideal companion to upgrade Wotan
• High speed
• High sensitivity