Piezoresistive MEMS Shock Accelerometers
Piezoresistive shock accelerometers, manufactured by MEMS technology, have low power consumption while still providing +/- 200 mV full scale output. They afford a wider operating temperature range when compared to mechanically isolated ICP® accelerometers. Their frequency response ranges from DC (0 Hz) to 20 kHz. To lessen the severity of response when their resonant frequency is excited, they incorporate squeeze film damping, achieving values of 0.02 to 0.06 of critical.