Vertical Batch Transfer & Notch alignment

VBT200A - Recif Technologies Inc. (Recif)

The Vertical Batch Transfer and Notch alignment machine (VBT200A) is a single stage, automated tool that can transfer a batch of 200mm wafers between semi-standard cassettes and align a batch of 200mm wafers by the notch.

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Table Tops Equipment

Recif Technologies Inc.

RECIF Technologies 150-200mm product range is composed of various kind of table tops equipment including wafer transfer, aligners and elevators.As a result of a technology license agreement, with its European partner EMU Technologies, RECIF proposes updated designs for its equipment line, without compromising the proven performances installed on the field for years.

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Batch ID Reader

IDWR200 - Recif Technologies Inc.

The system can be connected to the host by SECS/GEM through RS232 or Ethernet. Process recipes and maintenance can be accessed via a simple to use touchscreen interface.

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Single Wafer Transfer

Recif Technologies Inc.

The SPPE is the next generation of the RECIF/EMU SPP range, which has been installed at wafer fabs across the world since the late 1990's. Cassettes are mapped for wafer presence, cross or double slot detection and wafer safety sensors are active throughout the loading and transfer process.

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Batch Wafer Transfer

Recif Technologies Inc.

BPP (Batch Pick & Place) is a table top batch wafer tranfer tool that uses non-vacuum technology to transfer wafers between cassettes.Cassettes are mapped for wafer presence, cross or double slot detection and wafer safety sensors are active throughout the loading and transfer process.

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Notch Aligner

Recif Technologies Inc.

The ANA (Automated Notch Aligner) and MNA (Manual Notch Aligner) align a batch of 200mm wafers by the notch. Wafers are aligned using the heavily industrialized alignment technology developed by RECIF, used in the multiple standalone and OEM systems.

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Notch Finder Elevator

Recif Technologies Inc.

The NFE200 is a single stage tool that aligns wafers by the notch and elevates them for inspection by the Operator.Wafers are aligned using the heavily industrialised alignment technology developed by RECIF Technologies and used in the field for 10+ years. The final position can be selected through the User Interface.

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Single Wafer Elevator

Recif Technologies Inc.

The Selective Wafer Elevator (SWE) is a manually activated tool used to elevate a wafer from a Semi-Standard carrier. The wafer is held in an elevated position until the mechanism is released.

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Batch Slide Transfer

Recif Technologies Inc.

The AWT (Automated Wafer Transfer) and MWT (Manual Wafer Transfer) machnes transfer wafers horizontally between cassettes.On AWT, a series of sensors on the loading stage ensure cassettes are in the correct position for transfer. Removing a cassette during a transfer cycle will automatically stop the cycle. Mechanical guides on the load stage also help the Operator place the cassettes correctly.

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Flat Aligner

Recif Technologies Inc.

The AFA (Automated Flat Aligner) and MFA (Manual Flat Aligner) align a batch of 150mm wafers by the flat.Wafers are aligned using the heavily industrialized alignment technology developed by Recif Technologies, used in the multiple standalone and OEM systems.

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Flat Finder Elevator

Recif Technologies Inc.

FFE150 (Flat Finder and Elevator) is a single stage tool that aligns wafers by the flat and elevates them for inspection by the Operator.Wafers are aligned using the heavily industrialized alignment technology developed by Recif Technologies and used in the multiple standalone and OEM systems. The post alignment angle can be selected through the User Interface.

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