CMP Tester

The state of the art Rtec CMP tester CP-6 allows to study and characterize CMP process like never before. In addition to polishing wafers & substrates the tester comes with inline surface profilometer. This combinations sheds information on why and how the surface, friction, wear etc. changed. Tester also measures several inline parameters such as friction, surface roughness, wear volume etc. to understand the process in detail.

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Topics

Testers
Surface Roughness Testers
Friction Testers
Roughness Testers
Surface Roughness
In-line
Friction
Wear
Wafer
Profilometers