Wafer Handling System with Extended Vertical Travel, for 200mm, 300mm and 450mm Wafers

EVTMHS - Genmark Automation (Genmark Automation)

The EVTMHS is a wafer handling system with extended vertical travel designed to transport 300mm and 450mm wafers in semiconductor manufacturing tools that require large work envelope solutions.
The system can also handle 200mm wafers without any hardware changes. While for wafer sizes below 200mm, the robot End-Effector has to be reconfigured. The time that this reconfiguration takes is usually less than an hour including the time needed to teach all the pickup positions. Thus, the average teaching time of 45 minutes (for pickup locations) can be achieved thanks to the sophisticated autoteach routines provided by the system firmware.