OES Spectrometers
OES Spectrometers (Optical Emission Spectrometers for OEMs) optimized for SEMICON applications including plasma monitoring/end-point detection and reflectometry (with the addition of a flash lamp). The OES-Star features unmatched throughput and SNR, spectral coverage and < 1 nm resolution). Our new OES Family, OES-Star, VS70-MC and InVizU all include our latest “Multi-Communications interface” electronics (MC= EtherCAT, Ethernet, USB-2). The Invizu integrates both a linear CMOS sensor for UV-VIS and a TE-Cooled INGAAS sensor, which extends the spectral coverage to 1700 nm.
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UV-VIS-NIR Spectrometer
OES-Star
Horiba’s OEM division, a major supplier of OES solutions, has developed a high end OES Spectrometer with a proprietary optical configuration for broad coverage (185-1050 nm) and high resolution. The OES-Star is available with a selection of three UV-VIS-NIR Back-Illuminated (B.I.) sensors, one TE-Cooled and two uncooled CCD detectors. This unique OES system features an optical design that provides a high peak symmetry across a very broad spectral range combined with high spectral resolution better than 1 nm, at an unmatched aperture of F/2.3.
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Miniature Multi Communication UV-NIR Spectrometer
VS70-MC
VS70-MC (Multi Communication) is a high performance compact fiber coupled spectrometer system covering wide spectral range of 200 to 910 nm.This OEM optical module is built around HORIBA’s type-IV Aberration-Corrected Flat-Field Holographic Ion-Etched concave grating and is specially designed to easily adapt to a large variety of detectors and electronic drivers. This system is fitted with an integrated order-sorting filter to eliminate higher orders.
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Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra
PoliSpectra® M116 MultiTrack Spectrometer
HORIBA designs and manufactures a large range of custom OEM fiber-coupled, multi-spectra spectrometers capable of simultaneous measurement of up to 32 fiber channels and sequential measurement up to 96. Utilizing a concentric imaging spectrometer with a broadband spectral range and a customized fiber bundle, the HORIBA OEM multifiber spectrometers provide excellent imaging quality with minimum crosstalk.
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Ultra Compact and Broad Range Spectrometer
InVizU Cube
InVizU Cube (Infrared-Visible-Ultraviolet) is the latest evolution of the ultra compact, high performance spectrometers from the HORIBA Scientific OEM team. This dual system for industrial applications uses a modified miniaturized VS70 optical engine optimized for the UV-VIS spectral range along with the VS20 optimized for the NIR spectral range. The InVizU Cube is based on high performance aberration corrected concave holographic gratings fitted with custom multi-area order-sorting filter to eliminate higher orders.
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Grating Spectrometers
We offer a range of OEM instruments from miniature fiber spectrometers to research-grade grating spectrometer systems with TE or LN2-cooled CCD and InGaAs detectors.HORIBA Scientific provides miniature CCD and PDA USB spectrometers as well as 70 to 1250 mm focal length imaging spectrometers with single and multichannel detectors.If you are not a future OEM and are looking for larger, research-grade spectroscopy systems (focal lengths of 1/4 meter spectrometers and longer), please visit our Custom Spectroscopy Division
