Ultra-High Vacuum CVD Process System
Model UHV-CVD-5000 - TEK-VAC INDUSTRIES Inc. (TEK-VAC INDUSTRIES Inc.)
ur Ultra-High Vacuum CVD system is utilized for multi-wafer processing of doped and intrinsic high quality epitaxial films, including materials such as Silicon Germanium.
End products include SiGe components (RF & microwave devices, amplifiers, switches, discrete HBTs, and low noise MMICs) utilized in wireless communications applications such as cellular phones, pagers, local area networks, telemetry and sensors.
