Photoresist Curing System

MODEL PRC-2000 - TEK-VAC INDUSTRIES Inc. (TEK-VAC INDUSTRIES Inc.)

A Compact Vacuum Bake Module, Ideal for Processing up to 12" x 12" wafers.
Digital temperature control with P.I.D and auto tune features for precision control. Adjustable vacuum chucking pressure. Timed thermal contact provides excellent reproducibility. Automatic and manual versions. Safety interlocked Various fixture plates are available for multiple substrate processing.