Differential and Compensation Interferometers

One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.

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Laser Interferometer Position Measurement Systems

Keysight Technologies

When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.

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Beam Directing and Reflecting Optics

Keysight Technologies

Beam directing and reflecting optics simply reflect, bend or translate the beam, but do not typically modify the polarization, except for polarizing beam splitters. For example, mirrors, cube corners and retroreflectors are attached to objects that move in order to keep the weight down on the moving object (instead of mounting the interferometer on the moving object).

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2-Axis High-Resolution Laser Axis Board for VME

10898D - Keysight Technologies

The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.

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Single Axis Interferometers

Keysight Technologies

Linear, single-beam, and plane mirror interferometers measure motion on a single axis.

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Laser Heads

Keysight Technologies

The laser head is the source of the laser beam used in all laser motion and position measurement systems. The primary difference between laser heads is in the velocity, reference frequency and optical output power. Other considerations are size, heat dissipation, and input power requirements. Which laser you choose depends primarily on the application in which it will be used. For example, semiconductor lithography systems typically have faster moving parts (stages), and therefore need higher velocities than machine tool applications.

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Multiple Axis Interferometers

Keysight Technologies

Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.

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PC System Electronics

Keysight Technologies

Keysight PC electronics provide state of the art laser interferometer performance in the convenient PC backplane format. Axis, servo-axis and compensation boards are available.

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Receivers and Sensors

Keysight Technologies

Choose the optical receiver that meets your system performance and layout requirements. Add sensors for automatic compensation for environmental changes.

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VME System Electronics

Keysight Technologies

Keysight VME electronics give the highest performance available in a laser interferometer system. Choose from a variety of axis and compensation boards.

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Differential Interferometer

10715A - Keysight Technologies

The Keysight 10715A Differential Interferometer performs differential measurements between the supplied reference mirror and a measurement plane mirror. It provides exceptional long term stability. The 10715A minimizes dead path, and, because the entire optical path through the interferometer is common mode, it eliminates thermal drift in measurements. The resolution of the measurement is twice that of a linear or single-beam interferometer.

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One Axis Differential Interferometer

10719A - Keysight Technologies

The Keysight 10719A One Axis Differential Interferometer makes either a differential linear or angular measurement for use in single and multiple axis applications. The linear measurement gauges the displacement between two objects, such as a stage and an optical column or inspection tool. The 10719A also measures either pitch or roll. An angle is measured when both reference and measurement beams measure to the same mirror. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abb offset error.

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Wavelength Tracker

10717A - Keysight Technologies

The Keysight 10717A Wavelength Tracker tracks changes in the air's index of refraction to optically compensate for environmental changes. It uses one axis of a laser measurement system to report wavelength of light changes, not changes in position. It is used to correct displacement values reported by other measurement axes in the system, hence improving measurement accuracy. It provides a higher degree of accuracy than environmental sensors such as the 10751C and 10751D Air Sensors.

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