Spectroscopic Reflectometer

Nano-View Co. Ltd. (nano-view)

– Antireflective coating (ARC) on textured (poly-) crystalline silicon solar cell
Measurement
– Thickness, Reflectivity, n&k
Wavelength
– 420 – 950 nm (1.3-3.0 eV) : expandable
Accuracy (thickness measurement on specular sample)
– 104.5 nm for 104.8 nm SiO₂on c-Si
* Accuracy can be dependent on the quality of film
Thickness range
– 10 nm ~ 20 mm (depend on sample)
Data acquisition time
– < 1 s
Beam spot size
– ~ 50 mm
Focusing of beam
– Manual (optional auto-focus)
Sample stage
– Manual X-Y stage (specify sample size and travel distance)
(optional automatic X-Y stage for mapping)