Highly Sensitive Silica Monitor
SLIA-300 - HORIBA, Ltd.
The ultra-pure water that is used in the semiconductor production processes can be further purified by using an ion-exchange resin. Capturing the silica that is dissolved from this ion-exchange resin as quickly as possible can control the ultra-pure water quality, which is important during the production processes.HORIBA Advanced Techno has developed and employed a new "long light path length measurement cell" to enable highly sensitive measurement of ultra-low density silica and also realized a compact desktop model to improve the usability.