Mass Flow Controller for Low Flow
HFM-200 / HFC-202 - Teledyne Hastings Instruments
The HFM-200/HFC-202 is Teledyne Hastings' flexible, general purpose series of mass flow meters and controllers. Featuring reliability and stability, the 200 Series is chosen by OEM's for its very stable performance with varying ambient conditions. A wide choice of elastomer seals make this flow controller compatible with most gases.
The HFM-200 / HFC-202 meters and controllers have flow ranges from 0-10 sccm to flows of 0-25 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. Many corrosive gases and pressures up to 1000 psig are easily measured. Cleaning for oxygen service is available.