TMAH/H2O2 Monitor

The CS-139E is for TMAH/H2O2 solutions in the cleaning process in semiconductor manufacturing, and monitors the concentration of chemical solutions with high precision. Achieve unprecedented high-speed responsiveness and compactness. The concentration of each component of the TMAH/H2O2 solution (TMAH/H2O2/H2O), which is used as an alternative SC-1 for the removal of particles and organic matter, is constantly monitored. By feedback control employing monitor output, it is possible to keep the concentration of TMAH/H2O2 solution within the allowable range while eliminating unnecessary chemical solution exchange. In addition, a lineup of integrated coolers is also available, covering a wide range of sample temperatures.

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Topics

Process Control
Chemical
Component
Control
Monitors
H2O
Water
Semiconductor
Semi-conductor
Temperature