Spectroscopic Ellisopmeter for Simple Thin Film Measurement
Auto SE - HORIBA, Ltd.
The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.
Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.
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Spectroscopic Ellipsometry
Spectroscopic ellipsometry is a surface-sensitive, non-destructive, non-intrusive optical technique widely used for thin layers and surface characterization. It is based simply on the change in the polarization state of light as it is reflected obliquely from a thin film sample. Depending on the type of material, spectroscopic ellipsometers can measure thickness from a few Å to tens of microns. It is also an excellent technique for multi-layers measurement.
