'Absolute-Accuracy' Metrology-CT (MCT) System

MCT225 - Nikon Metrology, Inc.

This new 'absolute-accuracy' Metrology-CT (MCT) system guarantees that all internal and external geometry is measured efficiently. A proprietary liquid cooled micro-focus reflection source and air-cooled cabinet provide long-term stability and enable the MCT225 to achieve an impressive accuracy specification.