Scanning XPS Microprobe

PHI VersaProbe III - Physical Electronics

The PHI VersaProbe III is a highly versatile, multi-technique instrument with PHI’s patented, monochromatic, micro-focused, scanning X-ray source.  The instrument offers a true SEM-like ease of operation with superior micro area spectroscopy and excellent large area capabilities. The fully integrated multi-technique platform of the PHI VersaProbe III offers an array of optional excitation sources, sputter ion sources, and sample treatment and transfer capabilities.  These features are essential in studying today’s advanced materials and in supporting your material characterization and problem-solving needs.