Non-contact Measurement Wafer Sorting System (Robot Hand Tranceportation)

NC-3000R - NAPSON Corp.

*High accuracy measurement system for large diameter wafer
*Non-contact measurement of resistivity, thickness and conductivity (P/N)
*Compact design of Two-stage by measuring area and transfer area
*Number of cassette station can be changed by customers request Option : Add wafer flattness measurement system(FLA-200)