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13.0 kW and 3.5 kW 13.56 MHz RF Plasma Generators

13.0 kW and 3.5 kW 13.56 MHz RF Plasma Generators

The SurePower® platform of RF plasma generators is the most advanced class of 13.56 MHz generators commercially available. The SurePower® architecture incorporates state-of-the-art RF topologies, patented intrinsic power amplifier protection, improved design margins, and embedded V-I probe sensors to achieve the highest reliability, reproducibility, and accuracy of any generator in the marketplace today.

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