When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.
Beam directing and reflecting optics simply reflect, bend or translate the beam, but do not typically modify the polarization, except for polarizing beam splitters. For example, mirrors, cube corners and retroreflectors are attached to objects that move in order to keep the weight down on the moving object (instead of mounting the interferometer on the moving object).
The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.
One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.
The laser head is the source of the laser beam used in all laser motion and position measurement systems. The primary difference between laser heads is in the velocity, reference frequency and optical output power. Other considerations are size, heat dissipation, and input power requirements. Which laser you choose depends primarily on the application in which it will be used. For example, semiconductor lithography systems typically have faster moving parts (stages), and therefore need higher velocities than machine tool applications.
Keysight PC electronics provide state of the art laser interferometer performance in the convenient PC backplane format. Axis, servo-axis and compensation boards are available.
Choose the optical receiver that meets your system performance and layout requirements. Add sensors for automatic compensation for environmental changes.
Keysight VME electronics give the highest performance available in a laser interferometer system. Choose from a variety of axis and compensation boards.
The Keysight 10770A Angular Interferometer is a high accuracy plane mirror interferometer ideal for use in precision calibration applications. Used with the 10771A Angular Reflector in an 5530 Laser Calibration System, the interferometer measures pitch and yaw motions along each axis that a machine tool or measuring machine travels. The system can help quickly locate and evaluate unwanted angular motion.
The Keysight 10716A High Resolution Interferometer is used for single and multiple axis applications such as precision X-Y stages. The 10716A offers twice the resolution of conventional plane mirror interferometers and has the same excellent thermal stability as the 10706B High Stability Plane Mirror Interferometer. Measurement drift is typically of that exhibited by a conventional plane mirror interferometer. These features result in improved accuracy, repeatability, and thermal stability. However, slew rate is halved.
The Keysight 10705A Single Beam Interferometer, the smallest linear interferometer, is designed for making low mass or limited space single axis measurements. It is ideal for use in disk drive and other confined space applications. The single beam interferometer is called that because the outgoing and returning beams are superimposed on each other, giving the appearance of only one beam traveling between the interferometer and the retroreflector.
The 10702A includes one 10703A Retroreflector as a reference reflector. A second 10703A is needed to complete the linear measurement optic set. The interferometer cannot be used to bend the beam. If the interferometer is the moving component, the 10702A Option 001 must be ordered. More about the 10703A Retroreflector
The Keysight 10706A Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. The unique contribution of the 10706A is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.
The Keysight 10706B High Stability Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. This thermally stable optic, an exact functional replacement for the 10706A Plane Mirror Interferometer, reduces thermal measurement drift to 1/12 the value typically achieved by conventional plane mirror interferometers. The unique contribution of the 10706B is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.
The Keysight 10766A Linear Interferometer is used for general purpose single axis measurements and can be employed when the interferometer is the moving component, instead of the measurement reflector. It has a rugged, thermally stable stainless steel housing.
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