Hydrofluoric Acid Monitor

CM-200A/210A - HORIBA, Ltd.

The CM-200A/210A hydrofluoric acid monitors have been developed specifically to meet the stringent demands of semiconductor manufacturing. The CM-200A/210A provides a real time read-out of hydrofluoric acid concentration by measuring the electric conductivity of the sample solution. These superior units offer high repeatability even at low concentrations. The CM-200A/210A can be used for a variety of purposes ranging from monitoring etched wafer cleaning processes to any other industrial application of hydrofluoric acid.