Automatic Concentration Monitoring
ACS is an on-line chemical concentration monitoring system that can provide for keeping an uniform chemical condition by an real time measurement of chemical concentration monitoring in the manufacturing process of display and semiconductor as well as in the control industry of high-quality chemical solution control industry. The close examination and measurement of manufacturing process is an essential to produce an integrated, high quality semiconductor and FPD. The uniform and safety of input chemical on the process of cleaning and etching are directly influence on the product quality.
