MEMS Module
The design and modeling of microelectromechanical systems (MEMS) is a unique engineering discipline. At small length scales, the design of resonators, gyroscopes, accelerometers, and actuators must consider the effects of several physical phenomena in their operation. Consequently, COMSOL Multiphysics is ideally suited for MEMS applications. To this end, the MEMS Module provides predefined user interfaces with associated modeling tools, referred to as physics interfaces, for a variety of coupled physics, including electromagnetic-structure, thermal-structure, or fluid-structure interactions. You can include a variety of damping phenomena in your model: thin-film gas damping, anisotropic loss-factors for solid and piezo materials, anchor damping, and thermoelastic damping. For elastic vibrations and waves, perfectly matched layers (PMLs) provide state-of-the-art absorption of outgoing elastic energy.
