One Axis Differential Interferometer

10719A - Keysight Technologies

The Keysight 10719A One Axis Differential Interferometer makes either a differential linear or angular measurement for use in single and multiple axis applications. The linear measurement gauges the displacement between two objects, such as a stage and an optical column or inspection tool. The 10719A also measures either pitch or roll. An angle is measured when both reference and measurement beams measure to the same mirror. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abb offset error.