Wafer Mapping Sensor

Wafer Mapping Sensor

To provideĀ better safety and improved sensing accuracy, Panasonic studied the requirements for future Wafer Mapping SensorsĀ to ultimately develop the LED Beam Reflective Type Wafer Mapping Sensor, M-DW1. This Sensor uses LEDs as a light source for safe operation and a 2-segment receiving element for higher accuracy in wafer detection.

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