Spectroscopic Reflectometer

SR Series - Angstrom Sun Technologies, Inc. (AST)

Spectroscopic reflectometer (SR) tools are relative low cost and easy to use. To ensure accurate measurement on spectra, a long working distance and also adjustable working distance set up are professionally designed and considered. Since reflection spectra measurements require to use known reference to calibrate light intensity, it is hard to image that user could get accurate spectra without optimizing signal during such calibration because reference thickness is different from sample substrate's thickness in most of cases. Adjusting power output to lamp is our another consideration in ensuring a good measurement by reducing non-linearity effect of the detector.