Spectroscopic Ellipsometers

SE Series - Nano-View Co. Ltd. (nano-view)

Spectroscopic data measurement
– Visible range: 350~840 nm (or 1.5~3.5 eV)
– Data acquisition speed: 5 sec for full spectra of {Δ, Ψ}
Manually variable angle of incidence
– 45°~90° with 5° step
Single body system
– 40 cm (W) × 30 cm (D) × 30 cm (H), 15 kg (typical)
* UV- option requires external lamp power supply
Easy operation
– No set-up / No keys to control
– Low maintenance
User-friendly software
– operation and analysis
Other features
– Sample stage with tilt & height adjustments
sample size: (5 mm × 5 mm) ~ (200 mm × 200 mm)
– Computer with current operating software
Options
– Mapping stage: manual or automatic
– UV-option: 250~840 nm (or 1.5~5.0 eV)