Inspection Cluster

The Explorer® - Rudolph Technologies Inc.

The Explorer Architecture allows individual systems to be configured with any combination of wafer front, back, and edge module allowing the user to mix and match throughput and inspection type to best fit specific requirements and reduce cost-of-ownership.

The Explorer Architecture is a modular approach to wafer inspection consisting of one or more inspection modules with brightfield and darkfield illumination, a substrate handler, and software that coordinates the activities.