Inspection Module

The F30™ - Rudolph Technologies Inc.

Designed to blur the lines between DF micro inspection and traditional macro inspection, the F30 module boasts a five objective turret that enables the resolution-throughput flexibility required by today’s multi-process inspection applications. Equipped with Explorer Inspection Cluster's advanced productivity suite (Waferless Recipe Creation, Simultaneous FOUP, Recipe Server and Tool Matching), the F30 module redefines inspection cost of ownership expectations.