Automated Solution

AMX 6000 - Rudolph Technologies Inc.

The AMX™ Series is a laser darkfield inspection tool designed for unpatterned mask inspection. It offers high throughput up to 45 mask blanks per hour and compact design. Typical applications are incoming quality inspection of mask blanks and continuous tool monitoring for particle adders during manufacturing of mask blanks, e.g. coaters, writers, etchers, cleaners.