Standard Payload 300mm and 450mm Wafer Transport Tool

G-Rex3™ - Genmark Automation (Genmark Automation)

The G-Rex3™ robotic system offers a small footprint, optimal throughput, reliability and serviceability in a cost effective package. It features innovative patent-pending designs, advanced control approaches and EZTeach technologies resulting in improved performance and reliability. The G-Rex3™ is a simplified low-mass design with fewer parts and moving components. The result is improved dynamics leading to higher acceleration and speed.