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Surface Profiler Measurement System
SP series
SP series, high accuracy 3D surface profiler measurement system with white light interferometry.
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Optical Profilometers
Profilm3D® and Zeta™ optical profilometers provide fast, easy, non-contact solutions for 3D surface topography measurements. Our portfolio of optical profilers supports a variety of measurement techniques, including white light interferometry, True Color imaging and ZDot™ confocal grid structured illumination. KLA Instruments can help guide you to the right optical profiler solution for your unique needs.